| 摘要 |
PURPOSE:To detect a shape at a high response speed, in a shape detector applying external force to an object to be measured cyclically to detect the displacement quantity thereof, by removing the irregular vibration noise component of the object to be measured from the detected displacement quantity. CONSTITUTION:External force is cyclically applied to an object 1 to be measured by an external force applying device 4a and the displacement detection signal detected by a displacement detector 4b is inputted to a displacement quantity detection part 100. A first circuit consisting of a polarity change-over device 5, an integrating circuit 6 and a sample holding circuit 7 integrates displacement detection signals detected at every first period applying external force and at every second period applying no external force and subsequently samples the integrated value to detect the displacement quantity of the object to be measured. A second circuit consisting of HPF21, an integrator 22 and a sampling circuit 23 detects the irregular noise component of the object 1 to be measured. A device 24 of finite differences subtracts said noise component from the above mentioned displacement quantity. By this method, because the shape of the object to be measured can be obtained two times at every first and second periods, said shape can be detected at a high response speed.
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