| 摘要 |
PURPOSE:To nearly eliminate the production of dust at the time of the cleaning of a mask, and to almost automate operation and improve operation efficiency by providing a stage, a pure water nozzle, a lamp house, an upward/downward moving arm, a horizontal moving arm, a driving arm, and a rotary actuator. CONSTITUTION:When a mask M is set on the stage 3, a positioning jig 4 moves back, the driving arm 19 also moves back in an unclamping state, and the stage 3 beings to rotate. Pure water is injected from the pure water nozzle 5 at the upper part to clean up the surface of the mask M and the driving arm 19 moves after the washing of the surface to clamp the mask M again and moves up while clamping the surface-washed mask M. Then, the arm moves up from a point A to a point B and the rotary actuator 20 rotates thereby 180 deg. to set the mask M upside down. Then the driving arm 19 is lowered to set the mask M on the stage 3, whose reverse surface is washed. |
