| 摘要 |
PURPOSE:To miniaturize the title ozonizer and to improve the current efficiency by providing many protrusions and holes respectively on the surfaces of an anode and a cathode which are opposed to each other to form a discharge space, and impressing a narrow-width pulse high voltage while supplying a seed atom. CONSTITUTION:An oxygen-contg. gas or air is supplied from an inlet 5 into the discharge space 7 formed between the opposed anode 1 and cathode 2, ozone is generated by the discharge action, and the ozone-contg. gas is taken out from an outlet 6. Many protrusions 13 are provided on the surface of the anode 1 in the ozonizer, and many holes 3 are bored at the part of the cathode 2 facing the anode 1, and both electrodes 1 and 2 are connected to a power supply device 8 generating a high pulse voltage having <= several tens mus pulse width. The filament 10 of a seed electron generator 9 is arranged on the counter anode side of the cathode 2. An electron avalanche phenomenon is caused by electric discharge due to the seed electron 12 generated from the filament 10, and uniform and stabilized discharge is formed.
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