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发明名称
摘要
申请公布号	JPS6257098(B2)	申请公布日期	1987.11.30
申请号	JP19800077217	申请日期	1980.06.10
申请人	NIPPON AVIONICS CO LTD	发明人	KOIKE KIMIO
分类号	G01B11/00;H01L21/60	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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