PRODUCTION OF VERTICAL MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To obtain a vertically anisotropic magnetic film having high coercive force in the direction perpendicular to the vertically anisotropic magnetic field and film plane by treating the surface of a Ti film, which is formed by a vacuum deposition method on a substrate, by the particles from an ion gun, then forming a vertically anisotropic magnetic film essentially consisting of Co and Cr on the Ti film by a vacuum deposition method. CONSTITUTION:A polyimide film is run in the direction opposite from an arrow 7 and the Ti film is formed to 200Angstrom film thickness thereon. The evaporating material in a vapor source 6 is then changed to a Co-Cr alloy and the polyimide film deposited with the Ti film by evaporation is run in the direction of the arrow 7 and the vertically anisotropic magnetic Co-Cr film is formed to 25000Angstrom thickness thereon. A Kaufman type ion gun is used and the acceleration voltage of the ion gun is specified to -KV and the ion current density to 0.8mA/cm<2>. Ar is used for the gas to be introduced into the ion gun. The traveling speed of the substrate is specified to 15m/min, the deposition rate of the film to 9000Angstrom /sec and the temp. Tcan on the peripheral face of a cylindrical can to 200 deg.C and 270 deg.C.