| 摘要 |
PURPOSE:To make it easy to discover the deffects caused by the shadow of foreign matters, by setting a reduction ratio of the image of an original sheet to an object to be exposed as a larger value than the actual exposure ratio, and making it changeable. CONSTITUTION:A reduction optical system 6 is arranged between an original sheet 5 and an object 2 to be exposed. The image of the original sheet 5 is reduced by a specified actual exposure ratio, and projected on an object 2 to be exposed. In such a reduction projection aligner, the reduction ratio of the image of the original sheet 5 to the object 2 to be exposed is set as a larger value than the actual exposure ratio, and made changeable. When, prior to an actual exposure process, the object 2 to be exposed is exposed for a test, and foreign matters attaching to the original sheet are indirectly detected, a larger reduction ratio than the actual exposure ratio is applied to the exposure. Thereby it is made easy to discover defects caused by the shadow of foreign matters projected on the object to be exposed, the dection accuracy of foreign matters is improved, and the time necessary for detection is reduced.
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