| 摘要 |
<p>PURPOSE:To efficiently decompose NF3, by contacting NF3-containing gas with a substance based on at least one or more kind of a reducing catalyst, alumina and silica. CONSTITUTION:At least one kind of a reducing catalyst such as Ni, Fe, Co, Pt, Rh or Pd infiltrated in diatomaceous earth or alumina or an alumina gel, a silica gel or zeolite based on alumina or silica is contacted with NF3- containing gas at 20 deg.C for more. By this method, NF3 is decomposed and a component other than N2 becomes hard to generate.</p> |
