| 摘要 |
<p>PURPOSE:To improve throughput and avoid input mistakes and obtain an automatic mask changer with high reliability by a method wherein a medium in which mask identification information is recorded is attached to a mask cassette and an information reading means which reads the identification information automatically when the mask cassette is inserted into a cassette carrier is provided. CONSTITUTION:A controller of an automatic mask changer judges whether a slot contains a mask cassette 2 or not by a signal from a switch 12 and drives the bar-code reader 11 of the slot which contains the mask casette 2 to read mask identification information on a bar-code card and inputs the information to a memory circuit of the controller. When a new mask cassette 2 is inserted into a cassette carrier 1 while the changer is being operated, the insertion operation of the mask cassette 2 is detected by signals from 1st and 2nd photosensors 9 and 10 and further the completion of the insertion is confirmed by the signal from the switch 12. After that, the bar-code reader 11 is driven and the identification information of the newly contained mask cassette 2 is read.</p> |
