| 摘要 |
PURPOSE:To enable a stable measurement, by mounting a high-order LPF in a signal transmission path formed between an IC tester body and an IC to be measured to prevent possibility of overshooting, undershooting and the like. CONSTITUTION:To accomplish a stable measurement, it is necessary to intensity the cut-off property of an LPF so that a high frequency will be damped sufficiently as this would cause an overshooting or undershooting even if the cut-off frequency was set at a sufficiently high frequency with respect to the fundamental frequency of an original signal. To meet this requirement, a high-order LPF is provided in a signal transmission path between an IC tester and an IC to be measured. In other words, an operational amplifier A, a capacitor C and a resistor R are used to compose a quaternaly biquad LPF1. An IC tester side signal transmission path X is connected to an IC tester signal generating/receiving section, and an IC side signal transmission path Y to an input/output pin. Moreover, a switch S is controlled by a signal Z so that a signal transmission is done by omitting the passing through the LPF1, for example, when an output is on the IC side.
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