| 摘要 |
PURPOSE:To stably produce a photosensitive body that includes a photosensitive layer and excludes surface discontinuity by inserting a light shielding body into a gap between a substrate and a cylindrical confronted electrode surrounding said substrate after the photosensitive layer made of hydrogenation amorphous silicone is formed on the surface of the cylindrical substrate. CONSTITUTION:One or more cylindrical conductive substrates 2 are loaded on a rotational supporting body 5 perpendicularly arranged in a vacuum tank 8, and a hollow double-structured cylindrical confronted electrode 3 is arranged around the substrate 2. The substrate 2 and the electrode 3 are coaxial and electrically shielded by a metallic cylinder 6 fitted so as to surround the electrode 3 and upper and lower metallic covers 6. By the use of a cylindrical stainless shielding body 18 coaxial with the substrate 2, the photosensitive layer made of the hydrogenation amorphous silicone A-Si:H is formed on the surface 2 of the substrate 2 with the aid of a plasma CVD made of SiH. Then the shielding body is inserted between the substrate 2 and the electrode 3, and the collision of an a-Si:H film piece peeling off and scattering around the electrode 3 with a photosensitive film can be prevented in a step that cools the substrate 2 room temperature. |
