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发明名称
VORRICHTUNG FUER HALBLEITER-AUFWACHSEN AUS DER DAMPFPHASE
摘要
申请公布号
DE3716800(A1)
申请公布日期
1987.11.26
申请号
DE19873716800
申请日期
1987.05.19
申请人
TOSHIBA MACHINE CO.LTD.
发明人
EBATA,HITOSHI
分类号
B01J12/02;C30B25/16;H01L21/00;H01L21/205;(IPC1-7):H01L21/203;C30B35/00
主分类号
B01J12/02
代理机构
代理人
主权项
地址
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