发明名称 MASS SPECTROMETER FOR ION IMPLANTING APPARATUS
摘要 PURPOSE:To enable to displace the position of magnetic pole end faces without machining the magnetic pole so as to facilitate the initial setting and fine adjustment of the titled mass spectrometer for enhancing the accuracy and efficiency in the mass spectrometry by providing a sector-shaped electromagnet with the magnetic pole comprising the main body thereof and a pair of wedge-like magnetic pieces capable of moving freely along the main body. CONSTITUTION:A sector-shaped electromagnet 3 comprises the main body of the magnetic pole 6 and a pair of wedge-like magnetic pieces 7 capable of moving freely along the main body 6. The magnetic pieces 7 are moved in respective dierctions of the arrows G and H to make an effective magnetic field boundary E coincide with the boundary of the magnetic field in the ion optics. Position adjustment of an effective magnetic field boundary by the change of the fringing field near the magnetic pole end faces, which varies With the change of the center field intensity, is performed for setting an optimum ion optical system for all kinds of ions. Thus, the initial setting and the fine adjustment according to the operating conditions of the device can be easily made, and the precision and the efficiency of mass spectrometry can be upgraded.
申请公布号 JPS62272435(A) 申请公布日期 1987.11.26
申请号 JP19860114803 申请日期 1986.05.21
申请人 MITSUBISHI ELECTRIC CORP 发明人 FUKUMOTO SHINTARO
分类号 H01J37/05;H01J37/317;H01J49/20;H01J49/30 主分类号 H01J37/05
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