| 摘要 |
PURPOSE:To obtain the titled body which has 300-1,000kgf/mm<2> dynamical indentation hardness in a surface layer, and is composed of a-Si, and has an excellent electric characteristics of anti printing and anti moisture properties by composing a surface layer of the titled body of an amorphous material contg. silicone and carbon atoms as a main component, and contg. oxygen, hydrogen and fluorine atoms. CONSTITUTION:A blocking layer 2, a-Si type photoconductive layer 3 and the surface layer 4 are formed on the conductive substrate 1 of the titled body. The injection of the electric charge from the substrate 1 is stopped by the layer 2. The surface layer 4 is composed of the amorphous material contg. silicon (Si) and carbon (C) atoms as the main component and contg. oxygen (O), hydrogen (H) and fluorine (F) atoms, and an unsatd. binding contd. in said material is stabilized by H, O and F atoms. The amorphous material is composed of a-Si1-NCN (H, F, O) (0<N<1). Thus, dynamical indentation hardness of the surface layer 4 is a range of 300-1,000kgf/mm<2>, and said layer 4 has a property of the protective layer. The titled body having excellent anti-printing and anti-moisture properties is obtd. |
