| 摘要 |
PURPOSE:To detect the width and height of a pattern on a printed wiring board by irradiating the pattern with light from a black line lighting system and forming a black line on the pattern, and detecting its reflected light by two detectors. CONSTITUTION:A black line mask 13 is irradiated with the light from a light source 12. This mask 13 has a light shield part 13b provided on the surface of a transparent plate 13a. Transmitted light from the mask 13 is passed through a lens 14 for mask image formation to irradiate the pattern on the printed wiring board 1. At this time, the images of a light part A corresponding to the transparent plate 13a and a black line B corresponding to the light shield part 13b are formed on the pattern. Namely, the periphery of the center of the black line B is detected by a line sensor 17 through a lens 15 for reflected light image formation and the border part between the black line B and light part A is detected by a line sensor 18 through a lens 16 for reflected light image formation. The width and thickness of the pattern are detected by the line sensors 17 and 18 respectively to accurately detect the pattern. |
