| 摘要 |
PURPOSE:To determine the center of revolution precisely, and to prevent misregistration on bonding by reading the coordinates of an arbitrary point on a sample and the coordinates of a position where the sample is turned at 180 deg. and deciding the center of revolution on the sample side from the two coordinate values. CONSTITUTION:A sample 11 such as a lead frame is set onto a rotary column 12, a crossline 21a for a monitor TV 21 is conformed at an arbitrary point (a) on the sample 11 by operating a manipulator 24, and the coordinates of the arbitrary point (a) are read. Even when only the sample 11 side is rotated at 180 deg., the arbitrary point (a) and the crossline 21a are conformed by working the manipulator 24 again, and the coordinates of the arbitrary point (a) are read. Data read are transmitted over a controller 22, and coordinates corresponding to half said data are obtained by the controller 22. X, Y driving motors 20a, 20 are driven on the basis of the coordinate values, and the center of revolution of the sample 11 and the axis of a wedge 15 are made to coincide. |
