| 摘要 |
PURPOSE:To increase the rigidity in axial direction and utilize electric magnet effectively by installing a stator and a rotor, furnishing a solenoid at said stator, and equipping either of the stator and rotor with a plurality of permanent magnets. CONSTITUTION:Flux PHI1 running out from the N pole of permanent magnets 17, 18 returns to S pole via magnetic circuits situated on the way. That is, the flux PHI1 flows into No.3 stator yoke 15 from No.1 stator yoke 13 through No.1 and No.3 rotor yokes 22, 24 and a shortcircuiting magnetic substance 26, and further flows into No.2 stator yoke 14 via No.4 stator yoke 16 and No.4, No.2 rotor yokes 25, 23. As a result, magnetic attraction force is applied to each gap magnetic path G11-G14. At this time, displacement of rotor 12 is sensed by a location sensor 30 for X-axis, to allow current to flow through coils 20a, 20c of solenoids 21a, 21c, and thereby change in the attraction force due to displacement of flux PHI1 caused by permanent magnets 17, 18 is cancelled.
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