发明名称 PHOTOGRAPHING DEVICE IN ELECTRON MICROSCOPE
摘要 PURPOSE:To be able to take measures such as suspension of photographing or resumption of it in an early stage, by comparing an output signal from a detection means with a reference value and providing a notifying means to an operator in the case where the difference in the above exceeds a limiting value. CONSTITUTION:It is presumed that a filament is broken at a time t1 and after that intensity of electron beams becomes about zero. As a result, the difference between a signal from a sample holding circuit 11 and a signal sent to the first comparator circuit 12 through an amplifier 10 exceeds a preset limiting value at a time t2, so that the output signal of the first comparator circuit 12 is changed to a high level signal from a low level signal and an output signal of the second comparator circuit 17 is changed to a low level from a high level, after a time t3. Therefore, when the time t2 is prior to the time t3, the output signal of AND circuit 13 is also changed to a high level at the moment when the output signal of the first comparator circuit is changed to a high level. Thus, a lamp driving circuit 20 lights a lamp 19 at the receipt of this high level output of the AND circuit 13 and notifies and operator that the photographing ha ended in failure.
申请公布号 JPS62271335(A) 申请公布日期 1987.11.25
申请号 JP19860112140 申请日期 1986.05.16
申请人 JEOL LTD 发明人 HIRATA YOSHIHIRO
分类号 H01J37/22;H01J37/26 主分类号 H01J37/22
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