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发明名称
PHOTOSENSITIVE AND HIGH ENERGY BEAM SENSITIVE RESIN COMPOSITION CONTAINING SUBSTITUTED POLYSILOXANE
摘要
申请公布号
EP0232167(A3)
申请公布日期
1987.11.25
申请号
EP19870300976
申请日期
1987.02.04
申请人
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人
IMAMURA, SABURO;ONOSE, KATSUHIDE;TANAKA, AKINOBU
分类号
G03F7/075;(IPC1-7):G03F7/10
主分类号
G03F7/075
代理机构
代理人
主权项
地址
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