A contrast-enhancing agent for photolithography.

摘要

A contrast-enhancing agent for photolithography which comprises: (a) a photo-bleachable compound having, in its molecule, at least one characteristic structural unit represented by the general formula <CHEM> in which Z is a divalent group which forms a heterocyclic aromatic ring structure with the nitrogen atom, X is a monovalent anionic group and n is a positive integer; and (b) a water-soluble polymer as a binder. g