| 摘要 |
PURPOSE:To carry in or out a cassette continuously and efficiently by arranging the constitution in such a way that plural cassette receivers are shifted in an architrave-shaped guide frame and a cassette delivery mechanism, a belt con veyor and an elevator are combined so as to carry in or out the cassette, in a cassette loader for semiconductor wafer. CONSTITUTION:The elevating plate 8a of an elevator 8 is set at the same height as the sliding face 2c of a cassette receiver 4 and an outside guide frame 2 and the air cylinder 71 of one cassette delivery mechanism 7 is driven and a cassette mounting plate 6 is pushed forward onto the elevator 8a by a push plate 73. Then the actions of a conveyor 10 and the elevator 8a are combined and a wafer is stored in the cassette. At the same time with this, the cassette receiver 4 is shifted along a transfer passage 3. And this is processed by the other cassette delivery mechanism 7 in the same way. In this way, continuous processing can be realized and work efficiency can be improved.
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