| 摘要 |
PURPOSE:To maintain the constant temperature of a substrate even if power put into a target is increased and to stabilize a magnetic characteristic by connecting a substrate holder to an earth through a variable capacitor and controlling the capacity of the capacitor. CONSTITUTION:The substrate holder 7 is connected to the earth through the variable capacitor 1 and a resistance 2 and the target 11 is sputtered. The electrons collide with each other and a current is allowed to flow into the holder 7 through a high polymer substrate 9. A voltage in proportion to the current is applied to the resistance 2, and its potential is indicated by a voltmeter 3. By the use of an automatic controller, the voltmeter 3 controls the capacity of the capacitor 1 so that the potential when the voltmeter 3 indicates a temperature of about 150 deg. of the substrate 9 can be maintained. Thus the temperature of the substrate 9 can be kept constant even if the entered high frequency power is increased.
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