| 摘要 |
PURPOSE:To obtain high reactivity and high resolution to high energy rays by incorporating a silicone polymer not containing any functional group producing a specified siloxane bond in a compound having structural units each combining a specified group through oxygen. CONSTITUTION:The compound has at least one kind of the structural units combined through oxygen and represented by formula I-IX in which X is halogen or -CH2Y, Y is halogen or the like; R' is alkylsiloxane or the like; n is an integer of 1-5; and each of plural X may be same or different when plural X are combined in formulae I, IV, V, and VII. Said compound contains the total number of the groups of formulae I-IX amounting to >=25 and the sum of the groups of formulae I, IV, V, and VII amounts to >=10% of the total number of said groups I-IX, and said compound contains the silicone polymer not having any functional group producing a siloxane bond, such as a hydroxy or alkoxy group. |
