| 摘要 |
PURPOSE:To shorten a measuring time and to also perform measurement accurately, by a method wherein a measuring specimen is irradiated with laser beam through a half mirror, and an XZtheta pulse stage and two light detectors are controlled to automatically detect the diffraction efficiency of the entire surface of the specimen. CONSTITUTION:A pulse stage 14 is moved and positioned while controlled by CPU so that the laser beam 10 incident from the pinhole of a fluorescent screen 11 is regularly reflected from a substrate 1 to be incident on the pinhole. The laser beam 10 reflected by a half mirror 15 is detected by a detector 16. The diffracted beam reflected from the substrate 1 is reflected by the mirror 15 to be detected by a detector 16'. CPU calculates diffraction efficiency from the beam intensities detected by the detectors 16, 16' to output the same. Subsequently, the stage 14 is moved and the diffraction efficiency of the entire surface of the substrate 1 is measured rapidly and accurately in the same way. |
