| 摘要 |
PURPOSE:To prevent the developer from being wasted by a method wherein a valve is provided in a channel to stop the communication of developer while a ring in diameter larger than that of a wafer to be processed is provided on the head of a vessel to temporarily store the developer lifted up to the head. CONSTITUTION:A ring 3 in diameter larger than that of a wafer to be processed is provided to contain the wafer in the ring 3. The wafer S held on the back surface of a chuck 2 is approached to the head 1a of a vessel 1 to open solenoid valve 4 in a channel 1b simultaneously or almost simultaneously for lifting developer up to the head 1a and when the ring 3 is filled with the developer, the valve 4 is closed but kept open to store the developer while the wafer S is being developed. With the developement finished, another solenoid valve 6 in an exhaust channel 5 is opened simultaneously flowing water or air into an aspirator 7 to drain the developer stored above the head 1a of vessel 1 through the exhaust channel 5. Through these procedures, the developer can be prevented from being wasted. |
