| 摘要 |
PURPOSE:To clearly obtain the evaluation information of the bonded part of two plate-shaped members having different areas, by extracting only the contour of the image picked up by a TV camera and adding the C-scope image of a flaw detection figure to the extracted figure. CONSTITUTION:A specimen 5, wherein a tab 5a and a Si-chip 5b having different areas are bonded, is arranged in the water 13 of a water tank 12. In this case, the specimen 5 is arranged so that the chip 5b in the smaller area side is contacted with the bottom surface of the water tank 12 and the image thereof is picked up from the side of the chip 5b by a TV camera 6. The camera 6 is connected to an image input/output apparatus 10 and the image signal thereof is subjected to image processing and only the contour of the picked-up image is extracted as shown by Fig.(a). Fig.(b) shows a flaw detection figure of C-scope display obtained by the flaw detection of the specimen from the side of the tab 5a by a probe 4, and the outer shape drawing and adhesive part 5b of the tab 5a are displayed on a display device 11. Next, when the memory content of the image of Fig.(b) is added to the image memory or Fig.(a) in an up-and-down substituted manner, an image wherein both of them are superposed is displayed as shown by Fig.(c). By this method, the information of the adhesive part 5d is obtained in the contour of the chip 5b quantitatively.
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