| 摘要 |
PURPOSE:To uniformly heat a specimen to be heated to high temp., by arranging a uniformly heating member outside the specimen to be heated and irradiating said member with laser beam. CONSTITUTION:The circumference of a specimen TP is surrounded by a round pipe-shaped uniformly heating member 1 comprising silicon carbide and the like. The gear 11 provided on the lower end part of the member 1 is meshed with a drive gear 3 to rotate said member 1 by a motor 2. The laser beam LZ emitted from a laser beam source 5 is reflected by a mirror 4 to irradiate the member 1. The mirror 4 is shaken by a shaking cam 6 and the laser beam LZ is scanned in the longitudinal direction of the member 1. By this method, the specimen TP is uniformly heated to a desired temp.
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