| 摘要 |
PURPOSE:To execute an analysis of elliptically polarized light beams of reflected light beams without using a mechanical movable part, by executing a phase modulation to sample reflected light beams, separating a DC component, an omega component, and a 2omega component of a detecting light intensity signal, and executing the analysis, based on this separating signal. CONSTITUTION:As for light beams from a white light source 3, a monochromatic light beams are selected by a monochrometer 4, converted to linearly polarized light beams by a polarizer 5, and made incident on a sample 1. Elliptically polarized light beams which have been reflected from the sample 1 are varied alternately to counterclockwise circularly polarized light beams and clockwise circulary polarized light beams at a prescribed modulation angular velocity omega by a phase modulator 6. The light beam beams which have been polarized and modulated is inputted to a photodetector 8 through an analyzer 7, and varied to an electric signal. An output signal from the detector 8 is separated into a DC component, an omega component, and a 2omega component by a signal component separating circuit 9, and inputted to an arithmetic means 10. The arithmetic means 10 executes an analysis of the elliptically polarized light beams of the reflected light beams, based on each component which has been obtained from the separating circuit 9. |
