| 摘要 |
PURPOSE:To facilitate short-time and continuous transfer,by installing movable structure in which arms are moved in their facing direction. CONSTITUTION:When a wafer carrier 1 is transferred from an automatic carrier oar, a lifter 5 is operated to lift an elevator 9 to a definite position. An arm 3 in the automatic carrier car is turned to be positioned above arms 12. The arms 12, which are moved in their facing direction (in a closed state) by the energized force of a tension coil spring 14, are lifted as they are and fitted in a flange part 1a of the wafer carrier 1 upwards to be supported. Then, the lifter 5 is operated so that the elevator 9 is lowered to place the wafer carrier 1 on a lower transfer board 17 and then stopped on a position where it is a little more lowered. Successively, an opening plate 16 is raised to insert its upper part into a long hole 10a of a mounting plate 10 and bring its slant side 16a in contact with a rotation roller 15 so that the arms 12 are opened. Hence, efficiency in a transfer process can be improved.
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