METHOD FOR CONTROLLING TEMPERATURE OF BAND STEEL COOLER IN VACUUM DEPOSITION DEVICE

摘要

PURPOSE:to improve the productivity by arranging a temp. control system and a pressure control system, previously detecting the unstable condition of the process, and forcibly switching the temp. control of band steel to a pressure control method to stabilize the vapor deposition line in an exteremely short time. CONSTITUTION:The set value of the temp. of band steel 1 at the outlet of a cooler 3 is inputted to a temp. regulator 12. The cooling gas pressure in a plenum chamber 3a of the cooler 3 is set and controlled based on the output signal from the regulator 12 through a gas pressure regulator 13. The set value of the pressure of cooling gas in the chamber 3a against the set value of the temp. of the band steel 1 is determined through an arithmetic unit 15. The set value is inputted to the pressure regulator 13 to control the pressure of the cooling gas in the chamber 3a. The stability of the process in a vapor deposition chamber 5 is detected, and all the control is switched to the pressure control system when the process is unstable to control the temp. of the band steel 1.