| 摘要 |
PURPOSE:To prevent deterioration in electric characteristics and reliability due to corrosion at the contact part between a light transmitting conductive oxide (TCO) and a rear electrode and to obtain the rear electrode of a fine pattern, by constituting the extended part of the rear electrode, which is coupled with the interconnection pattern of the TCO, by the laminated body of a second metal layer including at least titanium and a third metal layer, whose main body is aluminum, as viewed from the side of a coupling plane. CONSTITUTION:A rear electrode 5 comprises an alloy, which includes one metal selected among Pt, Pd, Cu, Al, Cr, and Ag, from the part contacting with a semiconductor film 4. The electrode 5 is constituted by a laminated body, in which the following layers are laminated: i.e. a first metal layer 51 protecting the semiconductor film 4; a stable second metal layer 52 including at least titanium (Ti); and a third metal layer 53, which comprises Al alloy with Al as a main body and decreases wiring resistance. An extended part 5e of the rear electrode 5 comprises a laminated body, which at least includes the second metal layer 52 containing at least Ti where said first metal layer 51 is removed from the coupling part of an interconnection pattern 2Y, and the third metal 53, whose main body is Al. Therefore the third metal layer 53 with Al as the main body is not contacted with the interconnection pattern 2Y. |
