| 摘要 |
PURPOSE:To accomplish an inspection of a surface defect with high accuracy, by storing a scattered light data obtained during the scanning into a specified address corresponding to a laser beam irradiating position of a data memory section to perform a decision processing of a defect based on the data stored. CONSTITUTION:An object 8 to be inspected on a turntable 14 is irradiated with a laser beam from a pair of irradiating sections 13a and 13b and then, the table 14 is turned to scan the object 8 being inspected concentrically while it 14 is moved by a specified value radially for each scanning. Analog signals SA1 and SA2 outputted from irradiating sections 13a and 13b are subtracted 10 and a signal SA0 indicating a voltage difference therebetween is converted 32 into digital from analog to be outputted to a data memory section 33 as detection signal SB. A signal SAM indicating the positive-negative relation of the voltage difference is outputted to the memory section 33 from an analog computing circuit 10a. A digital signal SB0 indicating defect information of the object 8 being inspected outputted from the memory section 33 is inputted into a CPU 39 through a peak detecting section 34 and a defect sorting section 36 and a distribution of defect data, the number thereof and the like are displayed 11.
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