| 摘要 |
PURPOSE:To make the rotation of a susceptor smooth by supplying a carrier gas through a gap between a susceptor rotating part and a susceptor fixing part. CONSTITUTION:A susceptor rotating part 1 carrying a substrate 4 for growth is fitted in a recess of a susceptor fixing part 2 and a rotation carbon rod 3 rotates the substrate 4 through bevel gears notched on the susceptor rotating part 1 and the rotation carbon rod 3. A carrier gas H2 is supplied from an inlet 5 connected with the susceptor fixing part 2 into a growth chamber through a gap between the susceptor rotating part 1 and the susceptor fixing part 2. Thus, the susceptor can be rotated smoothly.
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