HF heating circuit for zone refining of semiconductors

摘要

The circuit, capacitively coupled to the HF generator, consists of an oscillating circuit contg. a capacitor (3) of medium value in parallel with a choke (4) and the heating cct connected in series. The heating cct consists of the grounded heating inductor coil (5) and a parallel capacitor, (6). The inductance value of the choke is much higher than that of the coil. The capacitance (3) and the HF-generator output voltage are adjustable