HIGH SPEED LASER PROBE

摘要

An apparatus for testing a high speed semiconductor device or integrated circuit which includes a device for directing a pulsed laser beam at a surface element of a device or integrated circuit to be tested; a device for detecting emitted photoelectrons from the surface element; and a device for computing the local potential of the surface element at the time of irradiation by the pulsed laser beam from an analysis of the emitted photoelectrons.