| 摘要 |
PURPOSE:To synthesize diamond at low temp. at the velocity of several times in comparison with a conventional method by feeding gaseous hydrocarbon, gaseous hydrogen and trace of inorganic gas contg. oxygen atom to a reactor and pyrolytically decomposing the mixture. CONSTITUTION:Methane 1 is used as gaseous hydrocarbon and water 7 is used as the trace of inorganic contg. oxygen atom. Methane 1 and hydrogen 2 are mixed after these are measured by flowmeters 3, and water 4 is accompanied with a gaseous mixture because it is bubbled in a thermostatic chamber 6 and fed to a reactor 5. The amount of water to be fed is regulated by controlling the temp. of water 7 incorporated in the thermostatic chamber 6 by a heater 8. The gaseous mixture introduced into the reactor 5 is pyrolytically decomposed by a tungsten heater 9 heated at 1,500-1,700 deg.C and diamond is deposited on a silicon wafer 10.
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