发明名称 OPTICAL SYSTEM FOR ILLUMINATION
摘要 PURPOSE:To uniformly illuminate the surface of split prism to be illuminated by introducing a luminous flux to a luminous flux splitting member having two split prisms made of a plurality of reflecting surfaces and an optical element disposed between the prisms and guiding the luminous flux emitted from the member to the surface to be illuminated to alleviate a speckle. CONSTITUTION:A split prism 5 is composed of a plurality of reflecting surfaces 5-1, 5-2, 5-3, ...reflecting an incident luminous flux of an S-polarized component at a predetermined rate and a full-reflecting surface 50. The luminous flux of a P-polarized component is rotated at a polarizing surface by an optical element 6 at 90 deg. to introduce it as the luminous flux of the S-polarized component to a split prism 7. The luminous fluxes divided in a plurality of the S- polarized component become the luminous flux of the P-polarized component, mostly reflected on a full-reflecting surface 70 to be emitted. After the flux is noninterfered to be emitted, the flux is guided to a fly eye lens 8, with the condensing point as a secondary light source surface, and the surface 10 to be illuminated is uniformly illuminated by a condenser lens 9 by using the luminous flux of uniform intensity distribution emitted from the light source surface by alleviating a speckle.
申请公布号 JPS62265722(A) 申请公布日期 1987.11.18
申请号 JP19860109983 申请日期 1986.05.14
申请人 CANON INC 发明人 OOUCHI CHIGUSA
分类号 G03F7/20;H01L21/027;H01L21/30 主分类号 G03F7/20
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