| 摘要 |
PURPOSE:To eliminate the need for calibration and to improve the reliability by attaining application to a light applied sensor based on the principle of the Fabry-Perot interferometer, and digitizing a measured quantity to obtain an absolute variation quantity and detecting it. CONSTITUTION:Light from a light source 1 with a relatively long wavelength range passes through a Fabry-Perot interference device 2 which varies in interference characteristics with the physical quantity to be measured and then an interference device 3 which varies in interference characteristics with an electric signal and is incident on and converted by a photodetecting device 4 into an electric signal. A microprocessor 5 receives the electrical signal from the photodetecting device 4 to send an electrical signal to a driving circuit 6 and also performs signal processing arithmetic.
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