| 摘要 |
PURPOSE:To measure EXAFS in an optional extremely small area by converging and using in-phase light from a Fresnel ring plate as the incident X ray of an EXAFS method. CONSTITUTION:A white X-ray beam 1 is made homogeneous by a mono- chromator and converged by the Fresnel ring plate 4 on a specific position in the surface and depth directions of a sample 5 to be inspected. A solid-state detector 6 is placed opposite the incidence surface of the sample and a fluorescent X ray from an aimed atom is measured by a multichannel analyzer 7 and recorded on a recorder 8. Then, the oscillation item of a spectrum is processed by Fourier transformation to find the kind, number, distance, etc., of atoms around the aimed atom. When the wavelength of the beam 3 is varied, the sample position is moved relatively to the Fresnel ring plate [distance (x) is varied] to hold an irradiation position constant while the wavelength is varied. |
