| 摘要 |
PURPOSE:To enhance abrasion resistance and corrosion resistance, in the doctor blade used in a developing apparatus, by using ZrO2 ceramics as a base material and providing a coating layer having high hardness and good close adhesiveness thereto. CONSTITUTION:As ZrO2 ceramics being a base material, ZrO2 ceramics containing 1-5mol% of Y2O3 or ceramics consisting of 50-90wt% of ZrO3 containing 2-5mol% of Y2O3 and the remainder mainly comprising Al2O3 is used. A coating layer comprising one or more kind of nitride, carbide and carbonitride of Ti, Zr, Hf, V, Nb is further formed on the base material by various vapor deposition methods. Whereupon, metal vapor is reacted with ZrO2 at the time of vapor deposition to form ZrN or ZrC which is, in turn, strongly bonded to TiN or TiC being a vapor deposition substance to impart abrasion resistance and corrosion resistance enhanced still more.
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