| 摘要 |
<p>PURPOSE:To dry a large-sized substrate safely without impairing the same by a method wherein a solvent heated by a heater is sprayed onto the substrate and dried. CONSTITUTION:Water stored in a water tank 10 is heated by a heater 11, and hot water thus obtained is sent to a heat exchanger 4 by a pump 12 so as to heat isopropyl alcohol (IPA) indirectly. Since a substrate 7 is heated by the heated IPA, the IPA on the substrate 7 is vaporized rapidly when spray is stopped, and thus drying of very excellent quality is enabled.</p> |
