| 摘要 |
<p>PURPOSE:To provide a safe drying apparatus having little possibility of a fire accident, by spraying a solvent heated in a hermetically sealed drying chamber. CONSTITUTION:Isopropyl alcohol (IPA) stored in a tank 1 is sent to a filter 3 and then to a heat exchanger 4 of a heater 13 by a pump 2 and heated thereat. Then, it is sprayed from a nozzle 5 onto a substrate 7 set in a drying chamber 6, subjected to water replacement, and thereafter gathered in the tank 1. while IPA is sprayed, the drying chamber 6 is covered with a cover 8, and the inside of the drying chamber 6 is exhausted by a duct 9. Therefore IPA is prevented from leaking outside the apparatus, and thus safety is ensured.</p> |
