| 摘要 |
PURPOSE:To improve the adhesion of nitride films by vapor-depositing an easily ion-nitridable metallic film on a metallic base material, ion-nitriding the film and the surface layer of the base material and coating the surface of the resulting nitride layer with the same kind of nitride. CONSTITUTION:A Cr film 2 is vapor-deposited on the surface of a metallic base material such as a base material 1 made of 13Cr stainless steel, gaseous N2 is introduced into an apparatus and a prescribed voltage is applied to the base material 1 under a prescribed pressure of gaseous N2 to cause glow discharge. The surface layer of the base material 1 and the whole Cr film 2 are ion-nitrided by the glow discharge to form a nitride layer 4. The surface of the layer 4 is then coated with CrN 3 by ion plating. Thus, the adhesion of the resulting nitride films 4, 3 on the surface of the base material 1 can be improved.
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