| 摘要 |
PURPOSE:To form a thin film to the end part of a substrate without enlarging a film forming device by forming the thin film on the substrate including the dummy part provided on the end part of the substrate, and then cutting off the film on the dummy part at the time of forming the thin film to the end part of the substrate with a partial film forming device. CONSTITUTION:A protrusion 2 of the dummy part is previously formed on glass 1, for example, when a rain sensor 4 is formed on the substrate windshield 1. The size and shape of the protrusion 2 are so controlled as to leave a region sufficient to hold the seal for a vacuum vessel around the sealing part 3 of the vacuum vessel when the glass 1 is fixed in the partial film forming device. The glass 1 thus prepared is fixed in the partial film forming device. In this case, the end part 5 of the rain sensor 4 to be formed is positioned at the end part (broken-line part A) of the glass 1 except the protrusion 2. The comb-line electrode of the rain sensor 4 and an insulating protective film thereon are formed in the same way as before under such conditions. After the film is formed, the glass 1 is taken out, and the glass 1 is cut into the main body 7 and the protrusion 2 by a grinder 6.
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