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发明名称
ROENTGENBELICHTUNGSGERAET
摘要
申请公布号
DE3712049(A1)
申请公布日期
1987.11.12
申请号
DE19873712049
申请日期
1987.04.09
申请人
CANON K.K.
发明人
AMEMIYA,MITSUAKI
分类号
G03F7/20;H05G2/00;(IPC1-7):G03F7/20;H01L21/312;H01L21/47;H01J35/00;G21K5/04;H05G1/26;H05H1/24
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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