| 摘要 |
PURPOSE:To prolong the life of a thin film magnetic head and the improve its reliability by restricting ruggedness on the side wall of a main part conductor formed by a lift-off method within <=0.2mum. CONSTITUTION:The ruggedness on the side wall of the main part conductor of the thin film magnetic head formed by the lift-off method is restricted within <=0.2mum and the minimum line width of the conductor is set up <=5mum and the ratio of film thickness to the minimum line width is set up to >=1. The ruggedness on the side of the conductor increases local current density and the dispersion of current. Thereby, heat generation or electro-migration is reduced and head noise is also reduced, so that the life can be prolonged and the performance and reliability can be improved.
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