| 摘要 |
PURPOSE:To enable the easy transfer and detection of a microbubble by introducing an Ni-Co alloy into a soft magnetic material and laminating the same and Ni-Fe alloy. CONSTITUTION:A conductor 5 for bubble control is formed via an SiO2 spacer 4 onto a garnet film for bubbles formed with the magnetic bubble 3 and an insulating film 6 is formed thereon. An Ni-Co alloy film 7, an SiO2 film 8, and Ni-Fe alloy film 9 are successively deposited to the upper part of the layer 6 and these films 7-9 are patterned. A magneto-resistance effect is increased and the S/N of the bubble is increased by adopting the Ni-Co as the soft magnetic material in the above-mentioned manner. The easy discrimination of the bubble is thus permitted. The coercive force is decreased and the transfer of the bubble is facilitated by forming the films into >=2 and more layers. Since the rate of the magnetic resistance change can be increased, the normal transfer is realized even in the region where the rotating magnetic field is small.
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