| 摘要 |
PURPOSE:To prevent mist or the like from generating by forming a waver conveyor of a central quartz in which a core made of a heat resistant material is inserted and fixing the conveyor to a supporting member without externally exposing the core portion of the conveyor. CONSTITUTION:A waver conveyor 10 for placing a boat 3, a supporting member 20 telescopic in the axial direction of a furnace tube 2 along guide rails 7, and a furnace door 5 for closing the tube 2 are provided. An arm member 11 is formed by inserting a rodlike core 112 molded of AI2O3 into a quartz tube 111 formed of high purity quartz material. After the member 20 is moved backward and the end diameter-reduced portion 11a of the conveyor 11 is disposed in a scavenger box 6, the boat 3 is placed on and supported to the portion 11a, the member 20 is then moved forward to introduce the conveyor 10 into the tube 2, and stopped when the door 5 is contacted with the inlet end of the tube 2 to close the inlet end of the tube 2 against elastic force. Thus, no dust nor mist is generated in the box 6.
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