| 摘要 |
PURPOSE:To decrease the man-hours and to reduce the manufacture cost by producing a vacuum in a can and to sealing the can by resistance welding. CONSTITUTION:When a sensor is charged airtightly in the can 10 under a vacuum, a vacuum pump is put in operation to evacuate the gap 13 between upper and lower electrodes 11 and 12. At this time, the can 10 and a stem are not adhered to each other completely, so air is sucked even from inside the can 10. Then the vacuum pump is operated for a specific time to produce a vacuum in the gap 13 between the electrodes 11 and 12 and in the can 10. Then, pressure is so applied to superpose the electrodes 11 and 12 on over the other and a high voltage is applied between the electrodes 11 and 12 at the same time. The electrodes 11 and 12 contact each other across an O ring 14, so a current flows through the can 10 and stem 4 to carry out resistance welding. Thus, the resistance welding is completed to seal the can 10 airtightly and one surface of a silicon diaphragm 1 is put under a vacuum, so the sensor is constituted while the man-hours are decreased.
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