Apparatus for forming thin film.

摘要

The present invention is directed to a method for forming a thin film by the use of a glow discharge plasma which comprises generating a magnetic field in a direction crossing an electric field for discharge at right angles and fluctuating the magnetic field; and the present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, a means for permitting the pressure reduction in the reaction vessel and the feed of reaction gases thereto, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for glow discharge is fed to the electrodes for discharge, a coil, surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles an electric field generated between the electrodes for discharge, and an AC power source from which a current for magnetic field generation is fed to the coil, whereby the thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.