| 摘要 |
PURPOSE:To stabilize drawing out of an ion beam, by making a needle buried tip consisting of a porous metal sintered body using metal powder which has good wettability with the ionization substance, which is contained in a pipe. CONSTITUTION:An ion source 30 of an ion generating device is constituted with a pipe 31, a cone shaped tip 32 to be inserted into one opening of the pipe, a needle 33 buried in the tip, and an ionization substance 40 contained in the pipe 31. The tip 32 shall consist of a porous metal sintered body, formed by molded and sintered tungsten powder or the like mixed with aluminum powder and nitrocellulose as a binder. And the ionization substance 40 is melted by the heat of a heater wire 50, and penetrates into the tip 32 and the ion beam is drawn out of the tip of the needle 33. Thus, the flow of the ionization substance 40 is easily controlled by selecting the diameters of constituent particles of the tip 32, and drawing out of the beam can be stabilized.
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